Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseChan, BTBTChanGronheid, RoelRoelGronheidDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26359Templated DSA with EUV-exposed pre-patternsProceedings paper