Lee, KookjinKookjinLeeKim, YeonsuYeonsuKimLee, HyebinHyebinLeePark, SojeongSojeongParkLee, YongwooYongwooLeeJoo, Min-KyuMin-KyuJooJi, HyunjinHyunjinJiLee, JaewooJaewooLeeChun, JunguJunguChunSung, MoonsooMoonsooSungCho, Young-HoonYoung-HoonChoKim, DoyoonDoyoonKimChoi, JunheeJunheeChoiLee, Jae WooJae WooLeeJeon, Dae-YoungDae-YoungJeonChoi, Sung-JinSung-JinChoiKim, Gyu-TaeGyu-TaeKim2022-09-222021-11-022022-09-2220210957-4484WOS:000614058600001https://imec-publications.be/handle/20.500.12860/38229Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FETJournal article10.1088/1361-6528/abd278WOS:000614058600001MEDLINE:33302263