Effect of CMP slurry filtration on wafer defectivity

Devriendt, KatiaKatiaDevriendtMeuris, MarcMarcMeurisHeylen, NancyNancyHeylenVrancken, EviEviVranckenGrillaert, JoostJoostGrillaertHeyns, MarcMarcHeynsLing, Zhi MingZhi MingLing2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2545Effect of CMP slurry filtration on wafer defectivityOral presentation