Vici, AndreaAndreaViciDegraeve, RobinRobinDegraeveHoriguchi, NaotoNaotoHoriguchiDe Wolf, IngridIngridDe WolfFranco, JacopoJacopoFranco2024-09-192024-08-162024-09-192024979-8-3503-6977-91541-7026WOS:001229691100028https://imec-publications.be/handle/20.500.12860/44327SILC and TDDB reliability of novel low thermal budget RMG gate stacksProceedings paper10.1109/IRPS48228.2024.10529347979-8-3503-6976-2WOS:001229691100028TRAP GENERATIONOXIDEDEGRADATION