Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterization

Le, Quoc ToanQuoc ToanLeVan Olmen, JanJanVan OlmenVanderheyden, RudiRudiVanderheydenKesters, ElsElsKestersKenis, KarineKarineKenisConard, ThierryThierryConardBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10760Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterizationProceedings paper