Stress simulation of embedded Si1-yCy source/drain nMOSFETs

Biswas, AbhijitAbhijitBiswasBargallo Gonzalez, MireiaMireiaBargallo GonzalezDe Keersgieter, AnAnDe KeersgieterSimoen, EddyEddySimoenEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenClaeys, CorCorClaeys2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13397Stress simulation of embedded Si1-yCy source/drain nMOSFETsProceedings paper