GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

Parvais, BertrandBertrandParvaisAlian, AliRezaAliRezaAlianPeralagu, UthayasankaranUthayasankaranPeralaguRodriguez, RaulRaulRodriguezYadav, SachinSachinYadavKhaled, AhmadAhmadKhaledElKashlan, Rana Y.Rana Y.ElKashlanPutcha, VamsiVamsiPutchaSibaja-Hernandez, ArturoArturoSibaja-HernandezZhao, MingMingZhaoWambacq, PietPietWambacqCollaert, NadineNadineCollaertWaldron, NiamhNiamhWaldron2021-12-212021-12-062021-12-2120202380-9248WOS:000717011600165https://imec-publications.be/handle/20.500.12860/38559GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOLProceedings paper10.1109/IEDM13553.2020.9372056978-1-7281-8888-1WOS:000717011600165