Correlation of fin shape fluctuations to FinFET electrical variability and noise margins of 6-T SRAM cells

Baravelli, EmanueleEmanueleBaravelliDe Marchi, L.L.De MarchiJurczak, GosiaGosiaJurczakSpeciale, NicoloNicoloSpeciale2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14940Correlation of fin shape fluctuations to FinFET electrical variability and noise margins of 6-T SRAM cellsProceedings paper