Metrology method for the correlation of line edge roughness for different resists before and after etch

Winkelmeier, StephanieStephanieWinkelmeierSarstedt, MargitMargitSarstedtErcken, MoniqueMoniqueErckenGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonse2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4943Metrology method for the correlation of line edge roughness for different resists before and after etchOral presentation