Gasseler, MMGasselerLoo, RogerRogerLooHarrison, J.FJ.FHarrisonCaymax, MattyMattyCaymaxRogge, SvenSvenRoggeTessmer, S.H.S.H.Tessmer2021-10-172021-10-172009-12https://imec-publications.be/handle/20.500.12860/15329Single-electron capacitance spectroscopy of individual dopants in siliconJournal article