Finders, JoJoFindersTzviatkov, PlamenPlamenTzviatkovRonse, KurtKurtRonseVan den hove, LucLucVan den hove2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1883Optimizing i-line lithography for 0.3-μm poly-gate manufacturingJournal article