Combined illumination sources for hyper-NA contact hole printing

Bekaert, JoostJoostBekaertTruffert, VincentVincentTruffertWillems, PatrickPatrickWillemsVan Look, LieveLieveVan LookOp de Beeck, MaaikeMaaikeOp de BeeckHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11709Combined illumination sources for hyper-NA contact hole printingJournal articlehttp://sst.pennnet.com/display_article/308911/5/ARTCL/none/none/IMEC-achiev