Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Li, YingyingYingyingLiWorsey, ElliottElliottWorseyBleiker, Simon J.Simon J.BleikerEdinger, PierrePierreEdingerKulsreshath, Mukesh KumarMukesh KumarKulsreshathTang, QiQiTangTakabayashi, Alain YujiAlain YujiTakabayashiQuack, NielsNielsQuackVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.GylfasonPamunuwa, DineshDineshPamunuwaNiklaus, FrankFrankNiklaus2023-12-142023-11-022023-12-1420232040-3364WOS:001085474400001https://imec-publications.be/handle/20.500.12860/43063Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry processJournal article10.1039/d3nr03429aWOS:001085474400001RELIABILITYTECHNOLOGYDESIGNMEDLINE:37856244