Study of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopy

Gong, ChunChunGongSimoen, EddyEddySimoenPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-1820100022-3727https://imec-publications.be/handle/20.500.12860/17160Study of silicon-silicon nitride interface properties on planar (100), planar (111) and textured surfaces using deep-level transient spectroscopyJournal articlehttp://iopscience.iop.org/0022-3727/43/48/485301/pdf/0022-3727_43_48_485301.pdf