Plasma sealing of a low-k dielectric polymer

Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherWhelan, CarolineCarolineWhelanCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9274Plasma sealing of a low-k dielectric polymerJournal article