Mao, ShengpingShengpingMaoRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24199FEM simulation and measurement validation of a cMUT cellProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813847&contentType=Conference+Publications