Improvement of cohesion strength in ULK OSG materials by pore structure adjustment

Krishtab, MikhailMikhailKrishtabVanstreels, KrisKrisVanstreelsSavage, T.T.SavageMatsunaga, K.K.MatsunagaDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24066Improvement of cohesion strength in ULK OSG materials by pore structure adjustmentMeeting abstract