Nitrogen analysis in high-k stack layers: a challenge

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstDe Witte, HildeHildeDe WitteVan Elshocht, SvenSvenVan Elshocht2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7342Nitrogen analysis in high-k stack layers: a challengeMeeting abstract