De Moor, PietPietDe MoorBaert, KrisKrisBaertBogaerts, LieveLieveBogaertsDu Bois, BertBertDu BoisJamieson, GeraldineGeraldineJamiesonJourdain, AnneAnneJourdainVan Hoof, ChrisChrisVan Hoof2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8778The Minipackage: a flexible wafer-level packaging solution for MEMSOral presentation