Pathak, ShibnathShibnathPathakVanslembrouck, MichaelMichaelVanslembrouckDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutVerheyen, PeterPeterVerheyenLepage, GuyGuyLepageAbsil, PhilippePhilippeAbsilBogaerts, WimWimBogaerts2021-10-222021-10-222014-041041-1135https://imec-publications.be/handle/20.500.12860/24366Effect of mask discretization on performance of silicon arrayed waveguide gratingsJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6730651