Understanding workfunction tuning in HKMG by Lanthanum diffusion combining simulations and measurements

Spessot, AlessioAlessioSpessotCaillat, ChristianChristianCaillatFazan, PierrePierreFazanRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchram2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23110Understanding workfunction tuning in HKMG by Lanthanum diffusion combining simulations and measurementsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6650587&queryText%3DUnderstanding+Workfunction+Tuning+in+HKMG+by+