Lorusso, Gian FrancescoGian FrancescoLorussoMoussa, AlainAlainMoussaHabashieh, SahelSahelHabashiehVan Den Heuvel, DieterDieterVan Den HeuvelVangoidsenhoven, DizianaDizianaVangoidsenhovenGupta, MihirMihirGuptaSuh, Hyo SeonHyo SeonSuhChen, Ying-LinYing-LinChenDe Simone, DaniloDaniloDe SimoneMack, ChrisChrisMackSun, WeiWeiSunSugie, MasakiMasakiSugieFoubert, PhilippePhilippeFoubertIsawa, MikiMikiIsawaCharley, Anne-LaureAnne-LaureCharley2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300017https://imec-publications.be/handle/20.500.12860/45962e-beam Metrology for High-NA: Revisiting the imec ProtocolProceedings paper10.1117/12.3052366978-1-5106-8639-7WOS:001514426300017