Lariviere, StephaneStephaneLariviereWilson, ChrisChrisWilsonKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaVersluijs, JankoJankoVersluijsDecoster, StefanStefanDecosterMao, MingMingMaovan der Veen, MarleenMarleenvan der VeenJourdan, NicolasNicolasJourdanEl-Mekki, ZaidZaidEl-MekkiHeylen, NancyNancyHeylenKesters, ElsElsKestersVerdonck, PatrickPatrickVerdonckBeral, ChristopheChristopheBeralVan Den Heuvel, DieterDieterVan Den HeuvelDe Bisschop, PeterPeterDe BisschopBekaert, JoostJoostBekaertBlanco, VictorVictorBlancoCiofi, IvanIvanCiofiWan, DannyDannyWanBriggs, BasoeneBasoeneBriggsMallik, ArindamArindamMallikHendrickx, EricEricHendrickxKim, Ryan Ryoung hanRyan Ryoung hanKimMcIntyre, GregGregMcIntyreRonse, KurtKurtRonseBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiMocuta, DanDanMocuta2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31120Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layersProceedings paperhttps://doi.org/10.1117/12.2299389