A fast and simple methodology for lifetime prediction of ultra-thin oxides

Nigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3703A fast and simple methodology for lifetime prediction of ultra-thin oxidesProceedings paper