Impact of shallow trench isolation depth on leakage current of shallow p-n junctions

Poyai, AmpornAmpornPoyaiRittaporn, I.I.RittapornRooyackers, RitaRitaRooyackersSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8034Impact of shallow trench isolation depth on leakage current of shallow p-n junctionsProceedings paper