Oechsner, RichardRichardOechsnerPfeffer, MarcusMarcusPfefferPfitzner, LotharLotharPfitznerRyssel, HeinerHeinerRysselBeer, KaiKaiBeerBoldin, MatthiasMatthiasBoldinDe Mey, BartBartDe MeyEngelhard, ManfredManfredEngelhardO'Murchu, CianCianO'MurchuWesterwick, AxelAxelWesterwickColson, PaulPaulColsonMadore, MichaelMichaelMadoreKrahn, LudgerLudgerKrahnKempe, WinfriedWinfriedKempeLuisman, EdEdLuisman2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9356E-learning for microelectronics manufacturingProceedings paper