Investigation of morphology and boron incorporation in heavily p-type CVD diamond film growth

Rouzbahani, RozitaRozitaRouzbahaniNicley, ShannonShannonNicleyPobedinskas, PauliusPauliusPobedinskasVan Bael, MarliesMarliesVan BaelHaenen, KenKenHaenen2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31687Investigation of morphology and boron incorporation in heavily p-type CVD diamond film growthOral presentation