Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns

Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseFenger, GermainGermainFengerCao, YiYiCaoGronheid, RoelRoelGronheidDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25000Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patternsProceedings paper