Hassani, Faezeh A.Faezeh A.HassaniCobianu, CornelCornelCobianuArmini, SilviaSilviaArminiPetrescu, VioletaVioletaPetrescuMerken, PatrickPatrickMerkenTsamados, DimitriosDimitriosTsamadosIonescu, AdrianAdrianIonescuTsuchiya, YoshishigeYoshishigeTsuchiyaMizuta, HiroshiHiroshiMizuta2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19050Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensorsJournal article