Picard, A.A.PicardEhrfeld, W.W.EhrfeldReinhardt, J.J.ReinhardtMorlion, D.D.MorlionVandewege, JanJanVandewegeVetter, P. J.P. J.Vetter2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1413High precision LIGA structures for optical fibre-in-board technologyProceedings paper