Schmidt, M.O.M.O.SchmidtVereecke, GuyGuyVereeckeVos, RitaRitaVosHolsteyns, FrankFrankHolsteynsBaeyens, MartienMartienBaeyensMertens, PaulPaulMertens2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8110Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning toolProceedings paper