Mody, JayJayModyZschaetzsch, GerdGerdZschaetzschKoelling, SebastianSebastianKoellingDe Keersgieter, AnAnDe KeersgieterEneman, GeertGeertEnemanKambham, Ajay KumarAjay KumarKambhamDrijbooms, ChrisChrisDrijboomsSchulze, AndreasAndreasSchulzeChiarella, ThomasThomasChiarellaHoriguchi, NaotoNaotoHoriguchiEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21161Scanning Spreading Resistance Microscopy for carrier profiling beyond 32nm nodeProceedings paper