Three-dimensional electrical characterization of carbon nanotube-based interconnects at the nanometer-scale

Schulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelDate, LucienLucienDateChiodarelli, NicoloNicoloChiodarelliEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19750Three-dimensional electrical characterization of carbon nanotube-based interconnects at the nanometer-scaleOral presentation