Vanhaverbeke, CelineCelineVanhaverbekeCauwe, MaartenMaartenCauweStockman, ArnoArnoStockmanOp de Beeck, MaaikeMaaikeOp de BeeckDe Smet, HerbertHerbertDe Smet2021-10-272021-10-2720190040-6090https://imec-publications.be/handle/20.500.12860/34315Comparison of copper electroplating, copper wet etching and linear sweep voltammetry as techniques to investigate the porosity of atomic layer deposited Al2O3Journal articlehttps://doi.org/10.1016/j.tsf.2019.137424