Deep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dots

Aouassa, MansourMansourAouassaVrielinck, HenkHenkVrielinckSimoen, EddyEddySimoen2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27755Deep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dotsProceedings paperhttp://ecst.ecsdl.org/content/80/4/181