Scaling CMOS: finding the gate stack with the lowest leakage current

Kauerauf, ThomasThomasKaueraufGovoreanu, BogdanBogdanGovoreanuDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10682Scaling CMOS: finding the gate stack with the lowest leakage currentJournal article