Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods

Caymax, MattyMattyCaymaxDecoutere, StefaanStefaanDecoutereRöhr, ErikaErikaRöhrVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsSprey, HesselHesselSpreyStorm, ArjenArjenStormMaes, J.J.Maes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3293Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methodsProceedings paper