Dopant/carrier profiling in non-planar or textured structures

Vandervorst, WilfriedWilfriedVandervorstDouhard, BastienBastienDouhardEyben, PierrePierreEybenSeidel, F.F.SeidelHantschel, ThomasThomasHantschel2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18221Dopant/carrier profiling in non-planar or textured structuresProceedings paper