Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM

Ohashi, TakeyoshiTakeyoshiOhashiYamaguchi, AtsukoAtsukoYamaguchiHasumi, KazuhisaKazuhisaHasumiIkota, MasamiMasamiIkotaLorusso, GianGianLorussoTan, Chi LimChi LimTanVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-262021-10-2620181932-5150https://imec-publications.be/handle/20.500.12860/31444Precise measurement of thin-film thickness in 3D-NAND device with CD-SEMJournal articlehttps://www.spiedigitallibrary.org/journals/Journal-of-MicroNanolithography-MEMS-and-MOEMS/volume-17/issue-2/024002/Precise-meas