Inoue, FumihiroFumihiroInouePeng, LanLanPengIacovo, SerenaSerenaIacovoPhommahaxay, AlainAlainPhommahaxayVisker, JakobJakobViskerVerdonck, PatrickPatrickVerdonckMeersschaut, JohanJohanMeersschautDara, PraveenPraveenDaraSleeckx, ErikErikSleeckxMiller, AndyAndyMillerBeyne, EricEricBeyne2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30939Influence of composition of SiCN for surface activated bondingProceedings paperhttp://ecst.ecsdl.org/content/86/5/159.abstract