Poly encapsulated LOCOS lateral isolation for 0.25 µm CMOS

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersDeferm, LudoLudoDeferm2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1064Poly encapsulated LOCOS lateral isolation for 0.25 µm CMOSProceedings paper