Li, JieJieLiKundu, ShreyaShreyaKunduSouriau, LaurentLaurentSouriauLazzarino, FredericFredericLazzarinoDevriendt, KatiaKatiaDevriendt2025-03-312025-03-312025-MAY0734-2101WOS:001450477000003https://imec-publications.be/handle/20.500.12860/45463Sputter yield and stoichiometry study of InGaZnO film in ion beam etchingJournal article10.1116/6.0004243WOS:001450477000003RAY PHOTOELECTRON-SPECTROSCOPYOXIDESILICONSURFACEANGLETRANSISTORSENERGIESOXYGENSIO2