Turnquest, K.K.TurnquestGraffenberg, V.V.GraffenbergPatel, S.S.PatelMiller, D.D.MillerDean, K.K.DeanGoethals, MiekeMiekeGoethalsVan Roey, F.F.Van RoeyHermans, J.J.HermansRonse, KurtKurtRonseWong, P.P.WongHansen, S.S.Hansen2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6897Recent advancements in 157nm resist performanceOral presentation