Generation rate analysis of different S/D junction engineering in scalted UTBOX 1-T DRAM

Nicoletti, TalithaTalithaNicolettiSasaki, Katia R.A.Katia R.A.Sasakidos Santos, Sara D.Sara D.dos SantosMartino, Jao AntonioJao AntonioMartinoAoulaiche, MarcMarcAoulaicheSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22862Generation rate analysis of different S/D junction engineering in scalted UTBOX 1-T DRAMProceedings paper