On the characterization and separation of trapping and ferroelectric behavior in HfZrO FET

Alam, Md Nur KutubulMd Nur KutubulAlamKaczer, BenBenKaczerRagnarsson, Lars-AkeLars-AkeRagnarssonPopovici, Mihaela IoanaMihaela IoanaPopoviciRzepa, GerhardGerhardRzepaHoriguchi, NaotoNaotoHoriguchiHeyns, MarcMarcHeynsVan Houdt, JanJanVan Houdt2021-10-272021-10-2720192168-6734https://imec-publications.be/handle/20.500.12860/32418On the characterization and separation of trapping and ferroelectric behavior in HfZrO FETJournal articlehttps://ieeexplore.ieee.org/document/8667000