Vanstreels, KrisKrisVanstreelsWu, ChenChenWuBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320152162-8769https://imec-publications.be/handle/20.500.12860/26113Mechanical stability of low-k dielectricsJournal articlehttp://jss.ecsdl.org/content/4/1/N3058.abstract