De Smedt, FrankFrankDe SmedtVinckier, ChrisChrisVinckierDe Gendt, StefanStefanDe GendtCornelissen, IngridIngridCornelissenHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4274A mechanism for the silicon oxide growth by ozonated solutionsProceedings paper