High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

Nag, ManojManojNagSteudel, SoerenSoerenSteudelBhoolokam, AjayAjayBhoolokamVaisman Chasin, AdrianAdrianVaisman ChasinRockele, MaartenMaartenRockeleMyny, KrisKrisMynyMaas, JorisJorisMaasFritz, ThomasThomasFritzTrube, JuttaJuttaTrubeGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-222021-10-2220141071-0922https://imec-publications.be/handle/20.500.12860/24304High performance a-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layerJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/jsid.212/abstract