CNT EUV pellicle:moving towards a full-size solution

Timmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierLee, Jae UkJae UkLeeMeersschaut, JohanJohanMeersschautRichard, OlivierOlivierRichardAdelmann, ChristophChristophAdelmannHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29585CNT EUV pellicle:moving towards a full-size solutionProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2280632