Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloNealey, PaulPaulNealeyGronheid, RoelRoelGronheidMatsunaga, KoichiKoichiMatsunagaSomervell, MarkMarkSomervellNafus, KathleenKathleenNafusCao, YiYiCaoLin, GuanyangGuanyangLin2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21392Implementation of directed self-assembly of block copolymers in the fab for defectivity analysisOral presentation